A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout
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- 作者：Habib Bilgina ; 1Author Vitae ; Shahrzad Zahertara ; 1Author Vitae ; Seyedehayda SadeghzadehaAuthor Vitae ; Arda D. Yalcinkayaa ; bAuthor Vitae ; Hamdi Toruna ; b ; hamdi.torun@boun.edu.tr" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae
- 关键词：MEMS ; Terahertz technology ; Metamaterials ; Microfabrication ; Optical readout
- 刊名：Sensors and Actuators A: Physical
- 出版年：2016
- 出版时间：15 June 2016
- 年：2016
- 卷：244
- 期：Complete
- 页码：292-298
- 全文大小：2121 K
文摘
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We developed a novel MEMS-based terahertz detector with metamaterial-based absorbers.
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We fabricated the detectors made of Parylene and titanium using microfabrication techniques.
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We characterized the absorption characteristics of the metamaterials using a terahertz timedomain spectroscope.
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We implemented a diffraction grating interferometer at pixel level for the detectors and present the experimental characteristics of the readout method.