Micro carving technology on tungsten was developed by combining laser beam machining and electrochemical etching.

Micro carving technology is capable of fabricating different shapes of tungsten micro pin arrays with sharp cutting edges.

The shape of each pin was pre-determined by the designated laser scanning path.

The core micro pin structures in various shapes were revealed using electrochemical etching.

The relative composition of tungsten and oxygen on the cross section by EDS reflects the results by laser scanning path control.