Microbowl-arrayed surface generated by EBL of negative-tone SU-8 for highly adhesive hydrophobicity
详细信息 查看全文
- 作者：Xiangmeng Li xiangmengli2010@stu.xjtu.edu.cn" class="auth_mail ; Jinyou Shao ; jyshao@mail.xjtu.edu.cn" class="auth_mail ; Yucheng Ding ycding@mail.xjtu.edu.cn" class="auth_mail ; Hongmiao Tian tian.hongmiao@stu.xjtu.edu.cn" class="auth_mail
- 关键词：EBL ; electron beam lithography ; CA ; contact angle ; CAH ; contact angle hysteresis ; PDMS ; polydimethylsiloxane ; PMMA ; polymethylmethacrylate ; PGMEA ; propylene glycol methyl ether acetate ; PEB ; post-exposure baking ; ICP-CVD ; inductive coupling plasma-chemical vapor deposition ; FESEM ; field emission scanning electron microscope
- 刊名：Applied Surface Science
- 出版年：15 July 2014
- 年：2014
- 卷：307
- 期：Complete
- 页码：365-371
- 全文大小：1823 K
文摘
- •
A unique microbowl-arrayed surface is generated by EBL over a large area.
- •
An advancing contact angle (CA) of 160° and a CAH of 90° are obtained.
- •
The patterned surface is capable of holding a 50 渭l water drop at 90° tilt.
- •
Contact state can be tuned by varying e-beam dosage and fluorocarbon coatings.