A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time
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- 作者：Qiu Xua ; Zhuoqing Yanga ; yzhuoqing@sjtu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Bo Fub ; Jianhua Lib ; Hao Wub ; Qihuan Zhanga ; Yunna Suna ; Guifu Dinga ; Xiaolin Zhaoa
- 关键词：Inertial micro-switch ; Surface-micromachining ; MEMS ; Compliant cantilever ; Contact time
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：30 November 2016
- 年：2016
- 卷：387
- 期：Complete
- 页码：569-580
- 全文大小：4953 K
文摘
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The designed cantilever beam attached to the proof mass can endure a larger shock acceleration (∼1000 g order of magnitude) compared to those traditional designs (∼100 g order of magnitude).
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Effect of the pulse width on the threshold acceleration, the response time and the contact time is investigated.
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A constraint sleeve structure is introduced to lower the off-axis sensitivity.