The effects of selenium content on Cu(InGa)Se₂ thin film solar cells by sputtering from quaternary target with Se-free post annealing

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• 作者：Leng Zhang ; Daming Zhuang ; ^{dmzhuang@tsinghua.edu.cn} ; Ming Zhao ; Qianming Gong ; Li Guo ; Liangqi Ouyang ; Rujun Sun ; Yaowei Wei ; Shilu Zhan
• 关键词：CIGS ; Quaternary target ; Se-free annealing
• 刊名：Vacuum
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：137
• 期：Complete
• 页码：205-208
• 全文大小：637 K
• 卷排序：137

文摘

The CIGS films were grown by sputtering a Se-rich and Se-poor CIGS quaternary targets. The annealing is conducted in Se-free inert atmosphere. The CIGS thin films fabricated by Se-poor target contain small amount of Cu2-xSe compound. The highest device efficiency of 12.5% has been achieved from Se-rich target.