Fabrication of disk microelectrode arrays and their application to micro-hole drilling using electrochemical micromachining
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- 作者：Minghuan Wang ; wangmh@zjut.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Zhaoyan Bao ; Xufeng Wang ; Xuefeng Xu
- 关键词：Disk microelectrode array ; Optimized cathode ; Electrochemical micromachining ; Micro hole array ; Hole taper
- 刊名：Precision Engineering
- 出版年：2016
- 出版时间：October 2016
- 年：2016
- 卷：46
- 期：Complete
- 页码：184-192
- 全文大小：2828 K
文摘
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ECM method based on FEM is effective for the fabrication of microelectrode arrays and does not require an iterative re-design process.
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Based on the prepared cylindrical micro electrode array, the disk micro electrode array could be fabricated by insulating the bottom of the electrodes.
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The disk micro electrode is effective to reduce the micro hole taper machined in EMM and good localization of material dissolution could be obtained.