High-efficiency and precision cutting of glass by selective laser-assisted milling
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- 作者：Yusuke Ito ; y.ito@nml.t.u-tokyo.ac.jp" class="auth_mail" title="E-mail the corresponding author ; Toru Kizaki ; Rin Shinomoto ; Masateru Ueki ; Naohiko Sugita ; Mamoru Mitsuishi
- 关键词：LAM ; laser-assisted machining ; SLAM ; selective laser-assisted milling ; SEM ; scanning electron microscope ; FIB ; focused ion beam
- 刊名：Precision Engineering
- 出版年：2017
- 出版时间：January 2017
- 年：2017
- 卷：47
- 期：Complete
- 页码：498-507
- 全文大小：3022 K
文摘
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Selective laser-assisted milling was proposed.
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Selectively heated area was removed with a cutting tool.
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It is possible to heat an area smaller than the size of the laser spot.
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The arithmetic average of the roughness profile decreased by 74%.
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Morphology of the chips was changed from crack type to quasi-continuous type.