Film synthesis of SrTiO₃ by the spray-ICP technique

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• 作者：Kyoung Jin Kim ; Mitsuo Suzuki ; Akira Yoshikawa ; Tsuguo Fukuda ; Keun Ho Auh ; Kun-Chul Shin
• 关键词：Spray-ICP technique ; Film growth ; SrTiO₃
• 刊名：Journal of Alloys and Compounds
• 出版年：2007
• 出版时间：16 August 2007
• 年：2007
• 卷：440
• 期：1-2
• 页码：216-219
• 全文大小：586 K

文摘

SrTiO₃ films were synthesized by spray pyrolysis in combination with a high-temperature inductively-coupled plasma (ICP) as the heat source (spray-ICP technique). Sapphire and fused quartz were used as substrates. Ten minutes of film formation yielded films of 0.5–1.0 μm in thickness. The structure of the films consisted of crystallites about 0.1 μm in size. With respect to the homogeneity of the size and shape of the crystallites, sapphire is superior over fused quartz. X-ray diffraction measurements of the films revealed preferred orientation peaks of (2 0 0), (1 1 1), and (1 1 0) depending on the substrates and their locations from the ICP source.