An experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams is presented.

A theoretical model is developed using the distributed parameter approach and verified against experimental results.

The dual beam resonators are demonstrated as a way to reduce the pull-in voltage and act as a low voltage switch.

Manipulating DC voltage is demonstrated as a way control the coupling between the resonators, hence controlling the bandwidth near the natural frequency of the beam making it viable for tunable bandpass filter applications.

Dynamic pull-in of the coupled system is studied and proposed as sensor capable of sensing both a positive or negative shift in the frequency.