Microwave absorption of 蔚-Fe₂O₃ precipitated from sputter deposited Fe-Si-O amorphous thin film by thermal annealing

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• 作者：Akinori Sawada ; Yuji Masubuchi ; Teruki Motohashi ; Masahide Sasaki ; Shinichi Kikkawa
• 关键词：Thin films ; Sputtering ; Electronic paramagnetic resonance (EPR) ; Optical properties
• 刊名：Materials Letters
• 出版年：15 January, 2014
• 年：2014
• 卷：115
• 期：Complete
• 页码：198-200
• 全文大小：830 K

文摘

Granular magnetic thin films were prepared by thermal annealing of rf-sputter-deposited Fe-Si-O amorphous films. The particle size of the precipitated Fe₂O₃ was controlled to obtain a pure 蔚-phase by adjusting the target chemical composition to an atomic ratio SiO₂/Fe₂O₃=2 and annealing for 1 to 3 h at 900 掳C. For a film annealed for 100 min, an almost symmetrical ferromagnetic resonance signal was observed, with no evidence of residual ferric ions in the amorphous silica matrix.