Good soft magnetic and high frequency characteristics are obtained in the [Fe₆₅Co₃₅/ZnO]₅₀ multilayer thin films.

ZnO layers take on increasing crystallization intensity as ZnO layer thickness t increases.

The resonance frequency f_r is almost invariable with increasing t and around 4 GHz. And the initial permeabilty 渭_i can be adjusted from 48 to 136 by decreasing t from 3.6 nm to 1 nm.

[Fe₆₅Co₃₅/ZnO]₅₀ multilayers have both high f_r and high electric resistivity 蟻 (up to 12.6 m惟 cm).

The multilayers exhibits a high real permeability 渭‘ (> 90) and a low imaginary component 渭“ (< 1.55) when f=2 GHz, and the quality factor Q value is more than 150 at f=2 GHz, which implys that [Fe₆₅Co₃₅/ZnO]₅₀ multilayer thin films are good candidate materials for high frequency applications on electromagnetic devices.