Improved H₂-sensing performance of nanocluster-based highly porous tungsten oxide films operating at moderate temperature

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• 作者：Meng Zhao^a ; ^b ; ^{zmmm1983@gmail.com}Author Vitae ; Chung Wo Ong^a ; ^{apacwong@inet.polyu.edu.hk}Author Vitae
• 关键词：H2 sensor ; WO3 nanoclusters ; High porosity ; Fast response ; High cyclic stability
• 刊名：Sensors and Actuators B: Chemical
• 出版年：2012
• 出版时间：November, 2012
• 年：2012
• 卷：174
• 期：Complete
• 页码：65-73
• 全文大小：2087 K

文摘

Many nano-metal oxides are claimed to be responsive to H₂ at room-temperature, but their response rates may be too low for the signal to reach equilibrium quickly. We investigated the H₂-induced resistive response of palladium-coated supersonic cluster beam deposited tungsten oxide (Pd/SCBD WO₃) films at temperatures T_sen between 20 and 140 ¡ãC. They are constructed of genuine nano WO₃ clusters (3-5 nm) loosely packed together, and have a high porosity. Slight increase of T_sen from room-temperature greatly speeds up the response rate and gives a strong apparent sensor response. Other advantages include excellent cyclic stability and selectivity against vapors of various organic compounds; negligible influence from moisture and mild ambient pressure dependence.