Plasmonic materials for metal-insulator-semiconductor-insulator-metal nanoplasmonic waveguides on silicon-on-insulator platform

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• 作者：M.P. Nielsen ; A. Ashfar ; K. Cadien ; A.Y. Elezzabi
• 关键词：Nanoplasmonics ; Waveguides ; Plasmonic materials
• 刊名：Optical Materials
• 出版年：December, 2013
• 年：2013
• 卷：36
• 期：2
• 页码：294-298
• 全文大小：1165 K

文摘

The use of various plasmonic metals and insulators in silicon based metal-insulator-semiconductor-insulator-metal (MISIM) nanoplasmonic waveguides are investigated for use in waveguiding applications at 1.55 渭m. Sputtered Au, Ag, and Cu as the metal cladding with thermally grown SiO₂ and ALD grown HfO₂ insulating dielectric spacer layers are examined to determine how their fabrication affects the crucial metal-dielectric interface. The experimental propagation lengths and coupling efficiencies to silicon-on-insulator waveguides are compared to theoretical values, with the Au/SiO₂ MISIM nanoplasmonic waveguide showing a propagation length of 7.25 渭m. The effect of including an adhesion layer for Au is shown to significantly increase losses.