Methanol sensing properties of honeycomb-like SnO2 grown on silicon nanoporous pillar array
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- 作者：Ling Li Wanga ; 2013064@zzuli.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Zi Jiong Lia ; Lei Luob ; Cheng Zhou Zhaoa ; Li Ping Kanga ; De Wei Liua
- 关键词：Tin oxide (SnO2) ; Silicon nanoporous pillar array (Si-NPA) ; Methanol sensor
- 刊名：Journal of Alloys and Compounds
- 出版年：2016
- 出版时间：15 October 2016
- 年：2016
- 卷：682
- 期：Complete
- 页码：170-175
- 全文大小：992 K
文摘
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A honeycomb-like SnO2 film was grown on Si-NPA by CVD method.
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The sensor based on SnO2/Si-NPA is sensitivity to methanol.
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The sensor shows fast response/recovery speed to methanol.
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The sensor is proved to be excellent selective to methanol.