Multidimensional nanopositioning flexure has been fabricated by electron beam melting of a titanium alloy.
Electron beam allows for direct 3D printing of Intricate, netted framework of the titanium flexure as a single part.
A digital PID controller has been used to control the nanopositioning stage comprising of the printed flexure and piezoelectric actuators.
The maximum static displacement of 47.4 μm was obtained at an application of 150 V.
Positioning error at 16 and 122 Hz linear sweep was within 200 and 500 nm (time delay 0.85 and 2.48 ms), respectively.