Metal additive manufacturing for microelectromechanical systems: Titanium alloy (Ti-6Al-4V)-based nanopositioning flexure fabricated by electron beam melting
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- 作者：Hasan S. FiazAuthor Vitae ; Casey R. SettleAuthor Vitae ; Kazunori Hoshino ; hoshino@engr.uconn.edu" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae
- 关键词：Electron beam additive manufacturing ; Electron beam melting ; Nanopositioning flexure ; Ti-6Al-4V ; Piezoelectric actuator ; PID control
- 刊名：Sensors and Actuators A: Physical
- 出版年：2016
- 出版时间：1 October 2016
- 年：2016
- 卷：249
- 期：Complete
- 页码：284-293
- 全文大小：3165 K
文摘
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Multidimensional nanopositioning flexure has been fabricated by electron beam melting of a titanium alloy.
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Electron beam allows for direct 3D printing of Intricate, netted framework of the titanium flexure as a single part.
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A digital PID controller has been used to control the nanopositioning stage comprising of the printed flexure and piezoelectric actuators.
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The maximum static displacement of 47.4 μm was obtained at an application of 150 V.
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Positioning error at 16 and 122 Hz linear sweep was within 200 and 500 nm (time delay 0.85 and 2.48 ms), respectively.