Precision positioning stages play a key role of major breakthroughs in broad research areas and industrial applications including bio-nanotechnology, nanometrology, semiconductor manufacturing, chemical science and engineering, nano-machining and nanofabrication, material science, and high-density data storage systems.

This paper presents cross-coupling effect of a polymer-based large range XYXY nanopositioner fabricated by an additive manufacturing (AM) process, stereolithography.

The results showed that the AM stage is capable of large range and high precision for single-axis or multi-axis operation, compact size and low cost applications such as high resolution microscope, surface profiler or coordinate measuring machine.