Scaling approach toward nano electro-discharge machining: Nanoscale patterning of carbon nanotube forests
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- 作者：Zhiming Xiaoa ; b ; xiaozmpe@gmail.com" class="auth_mail" title="E-mail the corresponding author ; Masoud Dahmardeha ; Mehran Vahdani Moghaddama ; Alireza Nojeha ; Kenichi Takahataa ; takahata@ece.ubc.ca" class="auth_mail" title="E-mail the corresponding author
- 关键词：Nano patterning ; Nano electro-discharge machining ; Scaling effect ; Breakdown voltage ; Carbon nanotube forest
- 刊名：Microelectronic Engineering
- 出版年：2016
- 出版时间：25 January 2016
- 年：2016
- 卷：150
- 期：Complete
- 页码：64-70
- 全文大小：1474 K
文摘
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We found out an approach to pushing the resolution limit of μEDM down to the nanometer scale.
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A scaling effect of electrode size on decreasing working voltage was demonstrated both experimentally and theoretically.
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Reduction of discharge pulse energy due to the decreasing working voltage was achieved and improved the resolution of μEDM.
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Nano-scale structures were fabricated on carbon nanotube forests using reduced size of electrode.