High-speed deposition of oriented orthorhombic NaTaO3 films using laser chemical vapor deposition
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- 作者：Ali M. Huerta-Floresa ; 1 ; Jianchao Chenb ; 1 ; Akihiko Itob ; c ; ito-akihiko-xr@ynu.ac.jp" class="auth_mail" title="E-mail the corresponding author ; Leticia M. Torres-Martí ; nezd ; Edgar Moctezumaa ; Takashi Gotob
- 关键词：Orthorhombic NaTaO3 ; Laser chemical vapor deposition ; Oriented growth
- 刊名：Materials Letters
- 出版年：2016
- 出版时间：1 December 2016
- 年：2016
- 卷：184
- 期：Complete
- 页码：257-260
- 全文大小：3660 K
文摘
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NaTaO3 thick films were first prepared by chemical vapor deposition route.
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Orientation of orthorhombic NaTaO3 films changed from (101) to (112) to (001).
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NaTaO3 films were composed of columnar grains.
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Facet structures were associated with orientations.
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Deposition rates of NaTaO3 films reached 120 µm h−1.