Chemical modification of B4C cap layers on Pd/B4C multilayers
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- 作者：Ratchadaporn Supruangneta ; b ; ratchadaporn@slri.or.th" class="auth_mail" title="E-mail the corresponding author ; Christian Moraweb ; Jean-Christophe Peffenb ; Hideki Nakajimaa ; Surachet Rattanasuporna ; Pat Photongkama ; Nichada Jearanaikoona ; Wutthikri Busayaporna
- 关键词：X-ray multilayers ; Multilayer degradation ; Protection layers
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：30 March 2016
- 年：2016
- 卷：367
- 期：Complete
- 页码：347-353
- 全文大小：3542 K
文摘
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The chemical modifications of B4C cap layers on sputtered Pd/B4C multilayer coatings for X-ray optical applications were investigated.
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The samples were studied using X-ray reflectivity, PES, PEEM, TEM, EDX and FT-IR.
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Both PES and PEEM investigations show that B is present in a B2O3 like compound at the sample surface.
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The depletion of B from B4C layers with initial thicknesses below 4 nm were confirmed using TEM and EDX data.