Low-temperature deposition of VO₂ films with high crystalline degree by embedding multilayered structure

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• 作者：Guangyao Sun^a ; Xun Cao^a ; ^{caoxun2015@gmail.com} ; Xiaoyan Li^c ; Shanhu Bao^a ; Ning Li^a ; Mengshi Liang^a ; Alexandre Gloter^b ; Hui Gu^a ; Ping Jin^a ; ^c
• 关键词：Low temperature deposition ; Vanadium dioxide ; Multilayer structure ; Epitaxial ; High degree of crystallinity ; Smart window
• 刊名：Solar Energy Materials and Solar Cells
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：161
• 期：Complete
• 页码：70-76
• 全文大小：1313 K
• 卷排序：161

文摘

Magnetron sputtering of VO2 was realized at 300 °C without annealing. VO2/TiO2/ZnO/Substrate displays better optical performance for smart window. Epitaxial relationship is VO2(M)(010)[100]//TiO2 (100)[001]//ZnO(001)[100], [010], [-1-10].