Size-dependent pull-in voltage and nonlinear dynamics of electrically actuated microcantilever-based MEMS: A full nonlinear analysis
详细信息 查看全文
- 作者：H.L. Daia ; b ; L. Wanga ; b ; wanglindds@mail.hust.edu.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：Electrically actuated microbeam ; Pull-in instability ; Nonlinear dynamics ; Modified couple stress theory
- 刊名：Communications in Nonlinear Science and Numerical Simulation
- 出版年：2017
- 出版时间：May 2017
- 年：2017
- 卷：46
- 期：Complete
- 页码：116-125
- 全文大小：1518 K
文摘
- •
A full nonlinear model based on modified couple stress theory is developed for cantilevered microbeams under electrical force.
- •
The geometric nonlinearities slightly affect the static pull-in voltages.
- •
The presence of geometric and inertial nonlinearities may change the frequency-response curves from a softening-type nonlinear behavior to a hardening-type one.
- •
The effect of small length scale parameter on the dynamic pull-in band of frequencies may be pronounced.