Observation of source gas depletion in narrow metal tube during internal diamond-like carbon coating with microwaves

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• 作者：Ryosuke Matsui ; ^{matsui@ume.mech.nagoya-u.ac.jp} ; Kazunori Mori ^{kazunori-mori@torishima.co.jp} ; Hiroyuki Kousaka ^{kousaka@mech.nagoya-u.ac.jp} ; Noritsugu Umehara ^{ume@mech.nagoya-u.ac.jp}
• 关键词：Internal coating ; Millimeter-sized narrow metal tube ; DLC ; Microwave ; High-density plasma ; Source gas depletion
• 刊名：Diamond and Related Materials
• 出版年：2013
• 出版时间：January, 2013
• 年：2013
• 卷：31
• 期：Complete
• 页码：72-80
• 全文大小：1368 K

文摘

For stable plasma generation inside mm-sized metal tubes and holes, we developed a new method of plasma generation using microwave propagation along plasma-sheath interface; ¡°Microwave-sheath Voltage combination Plasma (MVP)¡± method. In this work, we tried to homogenize the axial distribution of film thickness and property in internal diamond-like carbon (DLC) coating using MVP by further employing the method proposed by Segner; the characteristic of the method is to repeat the depletion and refill of source gas in a coated tube during plasma-on time and plasma-off time of pulsed plasma generation inside the tube, respectively. The variability of film thickness was improved from 35 % in our previous result to 14 % in this work. It was further demonstrated that the source gas depletion can be visualized by observing optical emission from Ar atom and C₂ dimer.