Low-temperature deposition of meta-stable β-MoO3(011) epitaxial thin films using step-and-terrace substrates
详细信息 查看全文
- 作者：Ryota Shimizu ; Kuniko Yamamoto ; Tohru Suzuki ; Takeo Ohsawa ; Susumu Shiraki ; Taro Hitosugi ; hitosugi@wpi-aimr.tohoku.ac.jp" class="auth_mail" title="E-mail the corresponding author
- 关键词：Molybdenum oxides ; Magnetron sputtering ; Substrate ; Epitaxial growth
- 刊名：Thin Solid Films
- 出版年：2015
- 出版时间：30 November 2015
- 年：2015
- 卷：595
- 期：part_PA
- 页码：153-156
- 全文大小：1249 K
文摘
- •
Meta-stable β-MoO3(011) thin films are fabricated using dc magnetron sputtering.
- •
Depositions on step-and-terrace substrates realize the β-MoO3(011) epitaxy.
- •
The step-and-terrace structure is a key to control the growth behavior.