Laser ablated plasma plume characteristics for photocatalyst TiO₂ thin films preparation

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• 作者：Tamiko Ohshima ; Shouta Nakashima ; Tsuyoshi Ueda ; Hiroharu Kawasaki ; Yoshiaki Suda and Kenji Ebihara
• 关键词：Laser ablation ; Plasma plume dynamics ; Titanium dioxide
• 刊名：Thin Solid Films
• 出版年：2006
• 出版时间：26 May 2006
• 年：2006
• 卷：506-507
• 期：Complete
• 页码：106-110
• 全文大小：327 K

文摘

The TiO₂ plasma plume produced by pulsed laser deposition (PLD) using a Nd:YAG laser (532 nm) is investigated by temporal and spatial resolved optical emission spectroscopy. Dynamics of neutral and ionized titanium species in the plume agreed with a drag model, which was explained as a collision between the excited species and ambient gas. The velocity of neutral oxygen atoms is constant in spite of increasing the delay time after the laser irradiation and the distance from the target. The crystallinity of TiO₂ films deposited in the ablation plasma of Ti and TiN target was higher than that of TiO₂ target.