Zr-based intermetallic diffusion barriers for stainless steel supported palladium membranes

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• 作者：Maslin Chotirach^a ; ^b ; Supawan Tantayanon^b ; ^c ; ^{supawan.t@chula.ac.th} ; Sukkaneste Tungasmita^d ; Korbratna Kriausakul^c
• 关键词：Intermetallic diffusion barrier ; Electroless plating ; Palladium membrane ; Zirconium oxide ; Zirconium nitride
• 刊名：Journal of Membrane Science
• 出版年：2012
• 出版时间：1 July, 2012
• 年：2012
• 卷：405-406
• 期：Complete
• 页码：92-103
• 全文大小：3165 K

文摘

Electroless-plated palladium membranes were prepared on stainless steel supports with thin Zr, ZrO₂ and ZrN films as intermetallic diffusion barriers. DC magnetron sputtering, and reactive DC magnetron sputtering in the presence of a 2 sccm nitrogen flow rate, were used to deposit the Zr films or ZrN films, respectively. ZrO₂ films were obtained from oxidation of Zr films in air at 500 ¡ãC. The as-prepared films were characterized by X-ray diffraction (XRD), electro dispersive spectrometry (EDS) and scanning electron microscopy (SEM) for their phase structure, elemental composition and surface morphology, respectively. The presence of the Zr-based membrane barriers significantly reduced the intermetallic diffusion of Fe, Cr and Ni into the palladium membrane, as determined by SEM-EDS line scans, and increased the hydrogen permeation flux in the order of Zr < ZrN < ZrO₂ for the same 0.5 ¦Ìm thickness. The results indicated that both ZrO₂ and ZrN thin (0.5 ¦Ìm) films are promising intermetallic diffusion barriers, not only for preventing the metal migration into the palladium membrane but also in giving a high hydrogen permeance.