Lorentz force based resonant MEMS magnetic-field sensor with optical readout
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- 作者：Byoungyoul Park<sup> ; sup><sup>parkb3@myumanitoba.ca" class="auth_mail" title="E-mail the corresponding authorsup>Author Vitae ; Meiting LiAuthor Vitae ; Sampath LiyanageAuthor Vitae ; Cyrus ShafaiAuthor Vitae
- 关键词：Magnetic sensor ; Silicon resonator ; MEMS ; Lorentz force ; Optical sensing
- 刊名：Sensors and Actuators A: Physical
- 出版年：2016
- 出版时间：15 April 2016
- 年：2016
- 卷：241
- 期：Complete
- 页码：12-18
- 全文大小：2487 K
文摘
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A Lorentz force based resonant MEMS magnetic-field sensor with optical readout has been designed, fabricated and tested.
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The rotating mirror is designed based on flexible springs and a mirror membrane, and fabricated by using bulk micromachining.
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The sensor demonstrated high sensitivity in atmospheric pressure, and controllable sensitivity by varying the AC bias.
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Operating with a maximum coil current (50 mA), the sensor is capable of a noise limited resolution of 400 pT with operation.