Effect of the plasma excitation power on the properties of SiO_xC_yH_z films deposited on AISI 304 steel

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• 作者：Nazir M. Santos^a ; Thais M. Gon&ccedil ; alves^a ; Jayr de Amorim^b ; Celia M.A. Freire^c ; José ; R.R. Bortoleto^a ; Steven F. Durrant^a ; ^{steve@sorocaba.unesp.br} ; Rafael Parra Ribeiro^a ; Nilson C. Cruz^a ; Elidiane C. Rangel^a
• 关键词：HMDSO ; Chemical composition ; Barrier properties ; Corrosion resistance ; Polymers films ; PECVD
• 刊名：Surface and Coatings Technology
• 出版年：2017
• 出版时间：15 February 2017
• 年：2017
• 卷：311
• 期：Complete
• 页码：127-137
• 全文大小：1686 K
• 卷排序：311

文摘

a-C:H:Si:O films were produced by PECVD. A polydimethylsiloxane-like structure at low plasma power becomes more inorganic at high power. A ten-thousand-fold increase in the total system resistance was achieved in electrochemical testing.