Mechanical stress and thermal aspects of the rotor assembly for turbomolecular pumps
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- 作者：Ziyuan Huang ; huangziyuan212@163.com" class="auth_mail" title="E-mail the corresponding author ; Bangcheng Han ; Kun Mao ; Cong Peng ; Jiancheng Fang
- 关键词：Turbomolecular pump ; Mechanical stress ; Thermal performance ; Rotor blade
- 刊名：Vacuum
- 出版年：2016
- 出版时间：July 2016
- 年：2016
- 卷：129
- 期：Complete
- 页码：55-62
- 全文大小：2689 K
文摘
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A novel magnetically levitated Turbo Molecular Pump is designed for the ultra-clean environment.
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A high speed permanent-magnet machine is chosen and designed to driven the Turbo Molecular Pump.
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The stress analysis of the machine and the rotor thermal performance evaluation is executed in this paper.
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The prototype is manufactured and tested to verify the theoretical method and the design concept.