Magnetic antidot arrays using SiO₂ filled diblock copolymer micelles as ion etching mask

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• 作者：S. Pü ; tter ; H. Stillrich ; A. Frö ; msdorf ; C. Menk ; R. Frö ; mter ; S. Fö ; rster ; H.P. Oepen
• 关键词：Magnetic nanostructure ; Antidot array ; Cobalt ; Platinum ; Sputtering ; Micelle ; Diblock copolymer
• 刊名：Journal of Magnetism and Magnetic Materials
• 出版年：2007
• 出版时间：September 2007
• 年：2007
• 卷：316
• 期：2
• 页码：e40-e43
• 全文大小：301 K

文摘

We present a simple method for the production of magnetic antidot arrays utilizing polystyrene-poly-2-vinylpyridine micelles filled with amorphous 2d562f87d33b30ac4fefa3ab"" title=""Click to view the MathML source"">SiO₂. By dip coating, a micellar monolayer is deposited onto Co/Pt multilayers. A hexagonal pattern with periodicity of 80 nm is obtained. By Ar⁺ ion etching the micelle layer is transformed into an antidot array due to preferred sputtering of the SiO₂ core. Further ion bombardment transfers the pattern into the magnetic film and leads to a reorientation of the perpendicular to in-plane easy axis which is attributed to intermixing of the Co/Pt multilayers.