Anodic galvannostatic treatment on n‐InP is carried out in liquid ammonia (−55 °C) under illumination.
Whatever the anodic charge, a phosphazene like film is revealed by XPS without thickening of the layer.
The film growth requires a nucleation step which is followed by a phosphazene coalescence phenomenon in the two dimensions of the surface.
A monolayer film of phosphazene is suggested and an excess of charge is observed which can be assigned to ammonia oxidation.