Actuation of silicon pillar micro-mechanical resonators by Kelvin polarization force

详细信息    查看全文

• 作者：Valeria Toffoli ; Fadlallah D ; ash ; Aless ; ro Pozzato ; Daniele Borin ; Sergio Carrato ; Marco Lazzarino
• 关键词：Pillar ; Resonators ; MEMS ; Kelvin ; Polarization
• 刊名：Microelectronic Engineering
• 出版年：2013
• 出版时间：November, 2013
• 年：2013
• 卷：111
• 期：Complete
• 页码：1-6
• 全文大小：1241 K

文摘

Pillars resonators arrays are emerging as powerful sensors for their peculiar characteristics, namely high mass sensitivity, high active areas density and operation in liquid. On the other hand, their characteristic vertical geometry and fabrication strategy hinders a direct integration within integrated circuits. So far, the examples reported in literature are based on a bulk piezoelectric actuation and optical lever detection, which are not suitable for further integration. In this paper we report on the design, fabrication and characterization of Kelvin polarization force actuated pillar resonator. This work represents the first step toward a full integration of pillars with on-chip electronic actuation and detection.