Nanoscale patterning of functional perovskite-type complex oxides by pulsed laser deposition through a nanostencil

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• 作者：Cristian-Victor Cojocaru ; Riad Nechache ; Catalin Harnagea ; Alain Pignolet ; Federico Rosei
• 关键词：Parallel patterning ; Nanostencil lithography ; Pulsed laser deposition (PLD) ; Perovskite complex oxides ; Ferroelectric nanostructures ; Barium titanate
• 刊名：Applied Surface Science
• 出版年：2010
• 出版时间：15 May 2010
• 年：2010
• 卷：256
• 期：15
• 页码：4777-4783
• 全文大小：1784 K

文摘

We present studies on parallel nanoscale patterning of piezoelectrics/ferroelectrics via deposition through a nanostencil. Unlike other processes reported for oxide nanostructuring, we selectively deposit the material, directly, by interposing a nanosieve between the substrate and the deposition source. We show that this selective deposition can be realized even with materials as complex as perovskite oxides, both at room temperature and at high temperature. We elaborate on and analyze the performance of the nanostenciling approach for the growth of barium titanate BaTiO₃ on strontium titanate SrTiO₃(1 0 0). The patterned structures of ferroelectric materials are characterized by X-ray diffraction and imaged locally by scanning probe microscopy in piezoresponse mode to individually probe their functionality.