Strain and tilt measurement using multi-point diffraction strain sensor

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• 作者：Jun Wang ; Wei Zhou ; Lennie E.N. Lim ; An ; K. Asundi
• 关键词：Optical grating and diffraction ; Strain sensor ; Wavefront sensor
• 刊名：Optics and Laser Technology
• 出版年：2008
• 出版时间：November 2008
• 年：2008
• 卷：40
• 期：8
• 页码：1099-1103
• 全文大小：875 K

文摘

A multi-point diffraction strain sensor (MDSS) was developed earlier by us for strain measurement with variable sensitivity and measurement range using a microlens array. The technique is now extended to measure both tilt and non-uniform strain with a sensitivity of 0.41 mε/pixel and 4.7 mrad/pixel. The validation was made through comparison of the strain measured using MDSS with that by a micro-Moiré interferometer incorporated with Gabor filtering method, while the tilt is compared with derivatives of the surface profile measured by a confocal microscope.