Modeling study on the surface morphology evolution during removing the optics surface/subsurface damage using atmospheric pressure plasma processing
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- 作者：Qiang Xin ; Xing Su ; Bo Wang ; bradywang@hit.edu.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：Optics ; Level set method ; Surface/subsurface damage ; Surface formation
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：30 September 2016
- 年：2016
- 卷：382
- 期：Complete
- 页码：260-267
- 全文大小：3443 K
文摘
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Despite of particle redistribution effect, isotropic etching plays a dominate role using APPP.
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Surface formation and damage removal are resulted from pits growing larger and merging with one another.
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Morphology duplicate etching is due to cracks with similar depth coalescing with each other.
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Procedure of surface planarization using APPP can be summarized into four parts.