Ti-diffused LiTaO3 strip optical waveguide was fabricated and fully characterized. Waveguide surface caves in 70 nm below crystal surface due to lattice contraction. Waveguide is single-mode, polarization-insensitive and has a loss <0.4 dB/cm. Ti profile follows a sum of two error functions in the width direction of waveguide. Ti profile follows a Gaussian function in the depth direction of waveguide.