Low voltage TEM: Influences on electron energy loss spectrometry experiments

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• 作者：M. Stö ; ger-Pollach
• 关键词：Low voltage EELS ; Low voltage TEM ; Low voltage HRTEM ; Energy resolution
• 刊名：Micron
• 出版年：2010
• 出版时间：August 2010
• 年：2010
• 卷：41
• 期：6
• 页码：577-584
• 全文大小：1333 K

文摘

We discuss the advantages and disadvantages of electron energy loss spectrometry (EELS) a transmission electron microscope (TEM) at different high tensions. Instrumental effects such as energy resolution, spatial resolution, and point spread function of the detecting system, as well as physical effects like inelastic (Coloumb) delocalization and Cerenkov losses are dealt with. It is found that the actually available equipment is suitable for performing low voltage experiments. The energy resolution of a thermo-ionic emitter can be tremendously improved at lower energies, and the detector also has advantageous behaviour.