Characterisation of hydrogen and erbium in carbon layers fabricated by PACVD for optical applications

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• 作者：Macková ; A. ; Perina ; V. ; Hnatowicz ; V. ; Nekvindová ; P. ; Prajzler ; V. ; Hü ; ttel ; I. ; et. al.
• 关键词：Carbon layers ; Rutherford backscattering spectrometry ; Elastic recoil detection analysis ; Active waveguides
• 刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• 出版年：2002
• 出版时间：April, 2002
• 年：2002
• 卷：188
• 期：1-4
• 页码：112-114
• 全文大小：58.8 K

文摘

Carbon films prepared by plasma assisted chemical vapor deposition were doped by laser active ion Er³⁺. The characterisation of the layers was performed using Rutherford backscattering spectrometry and elastic recoil detection analysis. Optical properties of the waveguides were measured at 660 nm wave length using standard prism spectroscopy. The correlation between the layer composition and the content of incorporated erbium and layer optical properties shows very interesting aspects [SPIE 4281, San Jose (2001) 13].