Atmospheric pressure plasmas for surface modification of flexible and printed electronic devices: A review

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• 作者：Kyong Nam Kim^a ; Seung Min Lee^a ; Anurag Mishra^a ; Geun Young Yeom^a ; ^b ; ^{gyyeom@skku.edu" class="auth_mail" title="E-mail the corresponding author}
• 关键词：Atmospheric pressure plasma ; Flexible electronic devices ; Surface activation and treatment surface texturing ; Sintering
• 刊名：Thin Solid Films
• 出版年：2016
• 出版时间：1 January 2016
• 年：2016
• 卷：598
• 期：Complete
• 页码：315-334
• 全文大小：5189 K

文摘

Recently, non-equilibrium atmospheric pressure plasma, especially those operated at low gas temperatures, have become a topic of great interest for the processing of flexible and printed electronic devices due to several benefits such as the reduction of process and reactor costs, the employment of easy-to-handle apparatuses and the easier integration into continuous production lines. In this review, several types of typical atmospheric pressure plasma sources have been addressed, and the processes including surface treatment, texturing and sintering for application to flexible and printed electronic devices have been discussed.