Thin micropatterned multi-walled carbon nanotube films for electrodes

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• 作者：Niina Halonen ; Jani M?klin ; Anne-Riikka Rautio ; Jarmo Kukkola ; Antti Uusim?ki ; Geza Toth ; Leela Mohana Reddy ; Robert Vajtai ; Pulickel M. Ajayan ; Krisztian Kordas
• 刊名：Chemical Physics Letters
• 出版年：2013
• 出版时间：17 September, 2013
• 年：2013
• 卷：583
• 期：Complete
• 页码：87-91
• 全文大小：1208 K

文摘

Micropatterned electrodes based on thin multi-walled carbon nanotube films are grown by catalytic chemical vapour deposition on lithographically defined quartz and Inconel alloy substrates. The electrical contact at the interface between the root of the nanotube arrays and the thin Ti hardmask layer on the quartz surface is found to be poor disabling proper capacitive characteristics. On the other hand, nanotube-Inconel electrodes show low series resistance and good electric double layer capacitor operation close to that of ideal devices. Patterning of the electrodes enhances both specific capacitance and power in reference to non-patterned bulk carbon nanotube film electrodes.