Analysis of gas membrane ultra-high purification of small quantities of mono-isotopic silane

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• 作者：Valmor F. de Almeida^a ; ^{dealmeidav@ornl.gov} ; Kevin J. Hart^b ; ^{hartkj@ornl.gov}
• 关键词：Dense polymeric membrane ; Polydimethylsiloxane (PDMS) ; Cellulose acetate ; Purification ; Mono-isotopic silane ; Gas separation
• 刊名：Journal of Membrane Science
• 出版年：2017
• 出版时间：1 April 2017
• 年：2017
• 卷：527
• 期：Complete
• 页码：164-179
• 全文大小：1611 K
• 卷排序：527

文摘

Comprehensive analysis of a gas membrane separation of high-value, small quantities of mono-isotopic silane. Exact mathematical formulas provided for systems aimed at removing slow-permeant impurities by recirculating the permeate stream, and fast-permeant impurities by recirculating the retentate stream. Application of closed formulae to estimate feasibility of silane purification to electronics-grade quality. Proposed concept for a multi-stage purification process of silane with multiple membrane polymeric materials.