Material removal mechanism in ultrasonic vibration assisted polishing of micro cylindrical surface on SiC
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文摘

Ultrasonic vibration could reduce friction force result in improve surface quality.

The contact model of ultrasonic vibration assisted polishing was established.

The introduction of ultrasonic vibration could decrease two-body abrasion.

Increase vibration frequency and amplitude could improve micro-structures quality.

The cylindrical arrays were successfully polished with the optimized parameters.

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