Effective Surface Recombination of p+ Layers Doped Using Ion Implantation or Surface Deposited B Sources
详细信息    查看全文
文摘
Two key factors need to be fulfilled in order to enable high efficiency bifacial p-type PERT cell. High bulk lifetime values retention during production processes, and minimized effective surface recombination, Seff in the p+ layer. The influence of boron doped layer parameters on the effective surface recombination in the p+ layer of an n+-p-p+ bifacial PERT solar cell is evaluated. Back IQE data of n+-p-p+ cells with over-doped p+ layer were used for evaluation of Seff values in the p+ layer. Simulation was made for several doping profiles with the surface doping concentration, Bs, in the range 1018 - 1020 cm-3. According to simulation, the dominating parameter controlling the effect of the built-in charge in the passivation layer on the effective surface recombination is the Bs level. For Bs values above ∼1019 cm-3 this charge has no significant influence. p+ layer doping was made by B ion implantation as well as by thermal diffusion from deposited B source. Measurements were performed on symmetrically B doped n-Si wafers with different passivation. Good agreement between simulation and measurements was found.

© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号

地址:北京市海淀区学院路29号 邮编:100083

电话:办公室:(+86 10)66554848;文献借阅、咨询服务、科技查新:66554700