Sputtered iridium oxide modified flexible parylene microelectrodes array for electrical recording and stimulation of muscles
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- 作者：Xiaoyang KangaAuthor Vitae ; Jingquan Liua ; jqliu@sjtu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; xykang@sjtu.edu.cn" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Hongchang TianaAuthor Vitae ; Bin YangaAuthor Vitae ; Yanna NuLibAuthor Vitae ; Chunsheng YangaAuthor Vitae
- 关键词：Sputtered iridium oxide film (SIROF) ; Flexible microelectrodes ; Neural interface ; Electrochemical impedance spectroscopy (EIS) ; MEMS ; Neural recording and stimulation
- 刊名：Sensors & Actuators: B. Chemical
- 出版年：2016
- 出版时间：31 March 2016
- 年：2016
- 卷：225
- 期：Complete
- 页码：267-278
- 全文大小：5201 K
文摘
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A flexible parylene microelectrodes array modified by sputtered iridium oxide film (SIROF) for electrical recording and stimulation has been successfully fabricated.
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The SIROF markedly reduces the impedance and increases the charge storage capacity (CSC) of the microelectrode.
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The averaged thermal noise amplitude for SIROF recording sites is 3.83 ± 1.02 μV which is only 10.4% of the Au recording sites as 36.87 ± 21.39 μV.
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The maximum SNR of SIROF microelectrode and bare gold microelectrode could reach 29.27 dB and 0.47 dB, respectively.
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The preliminary animal experiments validated the feasibility of SIROF microelectrode in electrical stimulation based on the three-axis force responses and torque responses.