Reprint of "Palladium Ohmic contact on hydrogen-terminated single crystal diamond film"
详细信息 查看全文
- 作者：W. Wang ; C. Hu ; F.N. Li ; S.Y. Li ; Z.C. Liu ; F. Wang ; J. Fu ; H.X. Wang ; hxwangcn@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：Palladium ; Ohmic contact ; Specific contact resistance ; XPS ; Annealing ; Surface treatment
- 刊名：Diamond & Related Materials
- 出版年：2016
- 出版时间：March 2016
- 年：2016
- 卷：63
- 期：Complete
- 页码：175-179
- 全文大小：1038 K
文摘
- •
The adhesion of Pd is much better than Au on H-diamond.
- •
The Pd contact shows excellent thermal stability up to 700 °C.
- •
The minimum specific contact resistance is evaluated to be 4.93 × 10−7 Ω cm2 at 400 °C.
- •
The barrier height is − 0.15 eV and − 0.03 eV for as-deposited and annealed sample.
- •
HNO3 vapor surface treatment before evaporation is found to reduce the specific contact resistance.