Modern methods of transfer theory used for solution of signal identification problems of XPS
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- 作者：V.P. Afanas'ev afanasyevvip@gmail.com" class="auth_mail ; P.S. Kaplya ; pavel@kaplya.com" class="auth_mail ; A.V. Lubenchenko LubenchenkoAV@mpei.ru" class="auth_mail ; O.I. Lubenchenko
- 关键词：Angle resolved XPS ; Surface analysis ; Film thickness ; Quantitative analysis
- 刊名：Vacuum
- 出版年：July 2014
- 年：2014
- 卷：105
- 期：Complete
- 页码：96-101
- 全文大小：788 K
文摘
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We calculate exact numerical solutions for XPS elastic peak angular distributions.
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XPS angular distributions were calculated for a finite thickness layer.
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Numerical solution is compared to transport and straight line approximations.