Piezoresistive Silicon Cantilever Covered by ZnO Nanorods for Humidity Sensing

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• 作者：Jingmei Yang ; Jiushuai Xu ; Wenze Wu ; Maik Bertke ; Hutomo Suryo Wasisto ; Erwin Peiner ; ^{e.peiner@tu-bs.de}
• 关键词：environmental monitoring ; MEMS technology ; silicon cantilever ; ZnO nanorods
• 刊名：Procedia Engineering
• 出版年：2016
• 出版时间：2016
• 年：2016
• 卷：168
• 期：Complete
• 页码：1114-1117
• 全文大小：210 K
• 卷排序：168

文摘

Gravimetric humidity sensing performance is described with piezoresistive silicon cantilevers covered by ZnO nanorods in a low-cost wet chemical deposition process. High sensitivity at small hysteresis between increasing and decreasing humidity loading is observed as well as a good temporal stability at constant humidity and temperature. Due to ease of interfacing with electronics and low-power operation promoted by resonant devices, we expect that the developed sensors will be highly attractive for wearable environmental monitoring applications.