Towards Feasibility of an Inkjet-Printed Capacitive Sensor for Position Tracking of a MOEMS-Mirror in a Michelson Interferometer Setup

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• 作者：Lisa-Marie Faller ; ^{lisa-marie.faller@aau.at} ; Hubert Zangl
• 关键词：MEMS ; FT-IR ; capacitive sensing ; noise analysis ; CRLB
• 刊名：Procedia Engineering
• 出版年：2016
• 出版时间：2016
• 年：2016
• 卷：168
• 期：Complete
• 页码：912-915
• 全文大小：240 K
• 卷排序：168

文摘

Mechanical micro-mirrors are, nowadays, employed in a variety of devices (measurement equipment as well as consumer goods). Drawbacks of the widely used optical position feedback are complexity and space requirements. We propose an inkjet-printed capacitive position sensor for a resonant MOEMS in a Fourier Transform InfraRed (FTIR) spectrometer as part of a smart packaging solution. Statistical models are adopted based on Finite Element Method (FEM) simulations for the dynamic system. A specifically designed hardware is considered to cope with the challenging requirements of a position accuracy of respos = 50 nm at a sample rate of B = 10 MS/s with an overall measurement range of rm = 1000 μm to be reached with a sensor limited to ds = 5 mm diameter at dmin = 500 μm minimum distance. A noise analysis is performed for direct and parametric measurement strategies, and the influence of uncertainties in the position measurement on resolution and bandwidth capabilities of the system are assessed.