Design and analysis of serially coupled double microring resonator based force sensor for 1 μN range measurement

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• 作者：Venkateswara Rao Kolli^a ; ^{venkukolli@gmail.com} ; Tupakula Srinivasulu^c ; Gopalkrishna Hegde^b ; T Badrinarayana^a ; Srinivas Talabattula^a
• 关键词：Microcantilever ; Microring resonator ; Force sensor ; Photo elastic effect ; Vernier effect
• 刊名：Optik - International Journal for Light and Electron Optics
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：131
• 期：Complete
• 页码：1063-1070
• 全文大小：1419 K
• 卷排序：131

文摘

We report the design and analysis of a serially coupled double microring resonator based force sensor for 1 μN range measurement. The change in the applied force can be monitored by change in the resonant wavelength shift at drop port of the double microring resonator. The current force sensor can measure the force range of 0–1 μN. The estimated resonant wavelength shift is 0.1 nm per 1 μN force. This force sensor provides large FSR of 114 nm, low FWHM of 0.08 nm and high Q-factor 19,000 compared to the force sensor based on single microring. This proposed device can be employed for sensing smaller forces in aerospace, automobile and other harsh environmental applications. This sensor can also be used as displacement, pressure sensor and accelerometer by appropriate change in the design.