Optimized tilted c-axis AlN films for improved operation of shear mode resonators
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- 作者：M. DeMiguel-Ramos ; T. Mirea ; M. Clement ; J. Olivares ; J. Sangrador ; E. Iborra ; eiborra@etsit.upm.es" class="auth_mail" title="E-mail the corresponding author
- 关键词：AlN ; Shear mode resonator ; Seed layer ; Tilted grains
- 刊名：Thin Solid Films
- 出版年：2015
- 出版时间：1 September 2015
- 年：2015
- 卷：590
- 期：Complete
- 页码：219-223
- 全文大小：796 K
文摘
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We fabricate reproducible AlN shear mode resonators with kS2 3.5% and QS 250 in air.
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The Qs drops to 150 when operating in water, enough for biosensing applications.
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We study the influence of the sputter conditions on the seed layer quality for optimizing performances.
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We identify the key factors to achieve reproducible high-quality AlN films with uniformly tilted grains.