On modeling beam-rigid-body microgyroscopes
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文摘
A comprehensive mathematical model of a beam-rigid-body gyroscope is introduced. The beam-rigid-body model (BRBM) is compared with the beam-mass model (BMM). The BRBM agrees with the 3D finite element analysis results while the BMM does not. The static and the dynamic responses are accurately computed using the new BRBM. Effective natural frequency and the pull-in voltage are correctly predicted using the BRBM.

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